CEC Electronics Equipment Group Co., Ltd. recently celebrated a significant milestone as its first domestically developed beam ion implanter achieved over 2 million stable operations on SMIC’s production line. Additionally, the company successfully sold its first 200mm Chemical Mechanical Polishing (CMP) equipment, marking a breakthrough in China’s semiconductor manufacturing sector. These achievements reflect the progress made under the “Major Science and Technology Projects†— commonly referred to as the “02 Special Projects†— where CEC plays a key role in developing advanced integrated circuit manufacturing equipment and complete process Solutions.
Over the past nine years, CEC has been deeply involved in several critical projects under the 02 Special Projects, including the development of high-angle ion implanters at 90-65nm nodes, core components for packaging equipment, low-energy beam ion implanters at 45-22nm, polishing equipment for 28-14nm processes, and 300mm thin wafer thinning machines. These efforts have enabled the company to break through key technologies in ion implantation and CMP equipment, leading to 146 invention patents and 22 provincial or ministerial-level awards.
CEC has also established a SEMI-standard-compliant ion implanter manufacturing platform, set up a postdoctoral research station, and obtained approval for the “Beijing Chemical Machinery Flattening Process Equipment Engineering Technology Research Center.†The company’s ion implanters and 200mm CMP equipment have now entered SMIC’s large-scale production lines, while its advanced packaging systems are being adopted by leading domestic companies.
As the core infrastructure of the information age, integrated circuits represent the pinnacle of global precision manufacturing. However, China has long faced challenges in accessing advanced chip manufacturing equipment, materials, and processes, resulting in heavy reliance on imports. To address this, the 02 Special Projects were launched in 2008, focusing on independent innovation in equipment, processes, and materials.
Zhang Boxu, director of the Beijing Economic and Information Commission, highlighted that these projects have filled critical gaps in the industrial chain, enabling China to compete globally. CEC, as a subsidiary of China Electronics Technology Corporation, has played a pivotal role in overcoming technological bottlenecks and supporting the growth of the semiconductor industry.
With decades of expertise in integrated circuit core equipment and military R&D, CEC has built a comprehensive range of semiconductor manufacturing solutions, including high-end display, photovoltaic, and power battery equipment. It is now the leading supplier of integrated circuit equipment in China, with strong capabilities in system integration and full-line turnkey solutions.
In the field of ion implanters, CEC has broken the monopoly of foreign suppliers, achieving over 100 invention patents and international patents. Its 12-inch beam ion implanter passed national acceptance in 2014, and by 2017, it had achieved mass production capacity, with a 50-unit annual output. The company's 45-22nm low-energy ion implanter is now used in leading IC production lines.
In the CMP sector, CEC’s 200mm commercial machine, developed independently, was verified by SMIC in 2021, marking a major step toward self-reliance in semiconductor manufacturing. This achievement has helped solve critical bottlenecks in China’s chip industry.
CEC has also made significant strides in advanced packaging equipment, supplying over 2,000 units to top domestic packaging companies. Its flip-chip bonders, automatic wafer thinners, and scribing machines are now at the forefront of domestic and international standards.
Looking ahead, CEC remains committed to driving innovation and industrialization, focusing on core equipment for integrated circuits. By strengthening R&D and expanding its industrial footprint, the company aims to build a national innovation center, support local development, and become a leader in smart manufacturing solutions across the country.
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